@article{PAR00006002,
  title = {{O}ptical size and concentration monitoring of slurries : comparison between measurements and {M}onte {C}arlo simulation},
  author = {{R}abhi, {M}. and {M}asion, {A}. and {R}oze, {C}. and {D}ussouillez, {P}. and {B}ottero, {J}ean-{Y}ves},
  editor = {},
  language = {{ENG}},
  abstract = {{O}ptical fiber sensors based on light backscattered by particles are widely used to measure the size and/or the concentration of suspended particles. {T}hey are used in several applications like {C}hemical {M}echanical polishing ({CMP}). {A}n optical device for high {C}oncentrated {CMP} silica slurry monitoring is presented. {T}o predict the response of the probe, a {M}onte {C}arlo simulation was developed. {T}his code was validated by using calibrated latex beads. {A} comparison between calculation and experimental data is given for dense suspensions of silica particles at different sizes and concentrations. {A} good correlation between measurement and simulation was found.},
  keywords = {{P}lasma diagnostics - probes ; {M}odels and simulations ; {D}etector modelling and simulations {I} (interaction of radiation with matter, interaction of photons with matter, interaction of hadrons with matter, etc)},
  booktitle = {},
  journal = {{J}ournal of {I}nstrumentation},
  volume = {5},
  numero = {},
  pages = {{P}04002},
  ISSN = {1748-0221},
  year = {2010},
  DOI = {10.1088/1748-0221/5/04/p04002},
  URL = {https://www.documentation.ird.fr/hor/{PAR}00006002},
}